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	<h1>Equipment</h1>
	<div class="page-title-hline">&nbsp;</div>
	










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  <h2><strong><span lang="en-US">A selection of our tools includes:</span></strong><span lang="en-US"></span></h2>
  <ul>
    <li><a href="http://www.oxfordplasma.de/pdf_inst/plas_80.pdf"><span lang="en-US">Inductively Coupled Plasma Etcher</span></a><span lang="en-US">&nbsp;</span>  </li>
    <li><a href="http://www.oxfordplasma.de/pdf_inst/plas_80.pdf"><span lang="en-US">Oxford Instruments Plasmalab 80Plus ICP65</span></a><span lang="en-US"> DRIE</span></li>
  </ul>
  <p><span lang="en-US"><strong>General Information</strong><br>
    Inductively Coupled Plasma (ICP) etching is a technique which uses a   radio frequency (RF) energy coupled into a low pressure gas by an   inductive coil mounted on the outside of a quartz window. This technique   allows fabrication of high aspect ratio silicon features with vertical   sidewalls; based on the inductive generation of a plasma containing free   fluorine (F), which etches silicon. Two independent power supplies are   used in this system. A low frequency supply is used to generate a high   density plasma above the surface of the substrate. A high frequency   supply provides a substrate bias to extract ions from the plasma. This   combination allows high density plasmas to process substrates at low   substrate bias which yields very high throughput and low damage to the   substrate. Instrument/process parameters such as gas flow rates, chamber   pressure, coil power and the geometries of the pattern being etched   affect process results. ICP etchers produce relatively low ion energies;   so biasing of the substrate being etched is used to tailor ion   bombardment energies and tune the degree of anisotropy of the etch   features. This machine is totally computer controlled. Process recipes   can be written while system is in the operate mode. Recipes can be run   automatically. Typical materials etched by this process include: SiN,   SiO2, Si, and metal masked materials.</span></p>
<p><span lang="en-US"><strong>Some Benefits of ICP include:</strong></span></p>
<ol>
  <li><span lang="en-US">ICP systems are simple and reliable making them ideal for both R&amp;D and production applications.</span></li>
  <li><span lang="en-US">ICP systems offer high etch rates and enhanced throughput.</span></li>
  <li><span lang="en-US">ICP systems offer excellent selectivity over common masking materials.</span></li>
  <li><span lang="en-US">ICP etch processes are highly uniform and reproducible.</span></li>
  <li><span lang="en-US">ICP etch processes produce excellent anisotropy.</span></li>
</ol>
  <p><span lang="en-US">ICP processes work very well on high aspect ratio features</span><span lang="en-US">.</span></p>
  <ul>
    <li><a href="http://www.oxfordplasma.de/pdf_inst/plas_80.pdf"><span lang="en-US">Plasma Enhanced Chemical Vapor Deposition system</span></a><span lang="en-US">&nbsp;</span></li>
    <li><a href="http://www.oxfordplasma.de/pdf_inst/plas_80.pdf"><span lang="en-US">Oxford Instruments Plasmalab 80Plus PECVD</span></a></li>
  </ul>
  <p><span lang="en-US"><strong>General Information<br>
  </strong></span><span lang="en-US">The   PECVD system Plasmalab 80 Plus (produced by Oxford Instruments Plasma   Technology, UK) is a 13.56 MHz driven parallel plate reactor with manual   sample loading and a heated substrate electrode. It can be used for   deposition of Si, SiO</span><span lang="en-US"><span dir="ltr"> </span>2</span><span lang="en-US">&nbsp;and Si</span><span lang="en-US"><span dir="ltr"> </span>3</span><span lang="en-US">N</span><span lang="en-US"><span dir="ltr"> </span>4</span><span lang="en-US">&nbsp;films on substrates of any shape and the sizes.</span><span lang="en-US"> </span></p>
  <ul>
    <li><a href="http://www.himt.de/en/products/dwl66fs.php"><span lang="en-US">Direct Write Laser Beam Lithography tool</span></a><span lang="en-US">&nbsp;</span></li>
    <li><span lang="en-US">Heidelberg Instruments </span><a href="http://www.himt.de/factsheets/dwl66fs.pdf"><span lang="en-US">DWL 66 Mikrotechnik GmbH</span></a></li>
  </ul>
  <p><span lang="en-US"><strong>General Information<br>
  </strong></span><span lang="en-US">High resolution pattern generator for low volume mask making and direct writing.</span></p>
  <p><span lang="en-US"><strong>Specifications / Capabilities:</strong></span></p>
  <ol>
    <li><span lang="en-US">1x1 to 6x6 inch square masks</span></li>
    <li><span lang="en-US">50 to 200mm wafer diameter</span></li>
    <li><span lang="en-US">Structures down to 0.6</span><span lang="el">&mu;</span><span lang="en-US">m</span></li>
    <li><span lang="en-US">Address grid down to 25nm</span></li>
    <li><span lang="en-US">Top and back-side alignment</span></li>
    <li><span lang="en-US">Auto-focus write heads</span></li>
  </ol>
  <p><span lang="en-US">Accepts DXF, GDS-II, CIF, Gerber, STL formats</span></p>
  <p><span lang="en-US">Scientific Opportunities / Applications</span><span lang="en-US">:</span></p>
  <p><span lang="en-US">Micron- and sub-micron lithography</span></p>
  <p><span lang="en-US">Patterning photo mask blanks as well as direct patterning of substrates up to 150 mm in diameter.</span></p>
  <p><span lang="en-US">Wet bench wafer-processing </span><span lang="en-US">(spin coating, chemical etching, oven) </span></p>
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    <p><strong>Page Title</strong>: Equipment - Concordia University - Montreal, Quebec, Canada</p>
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    <p style="margin-bottom: 0;"><strong>Date Printed</strong>: Tue December 13, 2011</p>
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var pageTracker = _gat._getTracker("UA-2729211-1");
pageTracker._setDomainName(".concordia.ca");
pageTracker._trackPageview();

/* Sub-domain Tracking Account */
var rollupTracker = _gat._getTracker("UA-12491794-1");
rollupTracker._setDomainName("encs.concordia.ca");
rollupTracker._trackPageview();

} catch(err) {}</script>


</div>
</body>
<!-- InstanceEnd --></html>
